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Data publication: CMOS-compatible manufacturability of sub-15 nm Si/SiO2/Si n...
The data included in the publication are results of SET device simulations, Monte-Carlo simulations of physical processes (ion-beam mixing, phase seepration, Si nanodot... -
Data publication: Ion-beam induced compositional and structural changes of Al...
Measurement results, obtained with a CAMECA IMS 7f-auto, of an as-deposited sample and a sample after 500°C thermal treatment.