Data for: Scanning transmission imaging in the helium ion microscope using a microchannel plate with a delay line detector

DOI

  A detection system based on a microchannel plate with a delay line readout structure has been developed to perform scanning transmission ion microscopy (STIM) in the helium ion microscope (HIM). This system is an improvement over other existing approaches since it combines the information of the scanning beam position on the sample with the position (scattering angle) and time of the transmission events. Various imaging modes such as bright and dark field or the direct image of the transmitted signal can be created by post-processing the collected STIM data. Furthermore, the detector has high spatial and time resolution, is sensitive to both ions and neutral particles over a wide energy range, and shows robustness against ion beam-induced damage. A special in-vacuum movable support gives the possibility of moving the detector vertically, placing the detector closer to the sample for the detection of high-angle scattering events, or moving it down to increase the angular resolution and distance for time-of-flight measurements. With this new system, we show composition-dependent contrast for amorphous materials and the contrast difference between small and high angle scattering signals. We also detect channeling related contrast on polycrystalline silicon, thallium chloride nanocrystals, and single crystalline silicon by comparing the signal transmitted at different directions for the same data set.

Identifier
DOI https://doi.org/10.14278/rodare.516
Related Identifier Cites https://doi.org/10.17815/jlsrf-3-159
Related Identifier IsReferencedBy https://doi.org/10.3762/bjnano.11.167
Related Identifier IsReferencedBy https://www.hzdr.de/publications/Publ-31506
Related Identifier IsIdenticalTo https://www.hzdr.de/publications/Publ-31631
Related Identifier IsPartOf https://doi.org/10.14278/rodare.515
Related Identifier IsPartOf https://rodare.hzdr.de/communities/ecfunded
Related Identifier IsPartOf https://rodare.hzdr.de/communities/fwi
Related Identifier IsPartOf https://rodare.hzdr.de/communities/ibc
Related Identifier IsPartOf https://rodare.hzdr.de/communities/rodare
Metadata Access https://rodare.hzdr.de/oai2d?verb=GetRecord&metadataPrefix=oai_datacite&identifier=oai:rodare.hzdr.de:516
Provenance
Creator Serralta Hurtado De Menezes, Eduardo (ORCID: 0000-0001-6254-022X); Klingner, Nico ORCID logo; Castro, Olivier de ORCID logo; Mousley, Michael ORCID logo; Eswara, Santhana ORCID logo; Duarte Pinto, Serge ORCID logo; Wirtz, Tom ORCID logo; Hlawacek, Gregor (ORCID: 0000-0001-7192-716X)
Publisher Rodare
Contributor European Commission
Publication Year 2020
Funding Reference European Commission info:eu-repo/grantAgreement/EC/H2020/720964/
Rights Creative Commons Attribution 1.0 Generic; Open Access; https://creativecommons.org/licenses/by/1.0/legalcode; info:eu-repo/semantics/openAccess
OpenAccess true
Contact https://rodare.hzdr.de/support
Representation
Language English
Resource Type Dataset
Version V1
Discipline Life Sciences; Natural Sciences; Engineering Sciences