All primary data files of measurements and processed data of the journal article "Comparative study of lattice parameter and pore size of ordered mesoporous silica materials using physisorption, SAXS measurements and transmission electron microscopy", are deposited. File types which are not easily readable have been converted to other formats, i.e. TIF and TXT, and have been deposited additionally. PDH files may be opened with the same applications as TXT files. The dataset contains the following data: nitrogen physisorption measurements, small-angle X-ray scattering curves, transmission electron micrographs. The data is named according to the sample name. A short description of the samples is given in the following:

OMS_TLCT: Ordered mesoporous silica material synthesized via true liquid crystal templating with hexadecylethyldimethylammonium chloride as surfactant

MCM-41: Ordered mesoporous silica material synthesized via a cooperative self-assembly process with hexadecyltrimethylammonium chloride as surfactant

SBA-15: Ordered mesoporous silica material synthesized via a cooperative self-assembly process with the poloxamer P123 as surfactant

SBA-15_sa: Ordered mesoporous silica material synthesized via a cooperative self-assembly process with the poloxamer P123 as surfactant and n-decane as swelling agent