HIM and AFM Data set from first AFM in the HIM test

DOI

In this work, the integration of an atomic force microscope (AFM) into a helium ion microscope (HIM) is reported for the first time. The helium ion microscope is a powerful instrument, capable of sub- nanometer resolution imaging and machining nanoscale structures, while the AFM is a well-established versatile tool for multiparametric nanoscale metrology. Combining the two techniques opens the way for unprecedented, in-situ, correlative analysis at the nanoscale. Nanomachining and analysis can be performed without contamination of the sample as well as avoiding environmental changes between processing steps. The practicality of the resulting tool lies in the complementarity of the two techniques as the AFM offers not only true 3D topography maps---something the HIM can only provide in an indirect way---but also allows for nanomechanical property mapping, as well as electrical and magnetic characterisation of the sample after focused ion beam materials modification with the HIM. The experimental setup is described and evaluated through a series of correlative experiments, demonstrating the feasibility of the integration.

Identifier
DOI https://doi.org/10.14278/rodare.250
Related Identifier IsIdenticalTo https://www.hzdr.de/publications/Publ-30718
Related Identifier IsReferencedBy https://www.hzdr.de/publications/Publ-30689
Related Identifier IsPartOf https://doi.org/10.14278/rodare.249
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Metadata Access https://rodare.hzdr.de/oai2d?verb=GetRecord&metadataPrefix=oai_datacite&identifier=oai:rodare.hzdr.de:250
Provenance
Creator Hlawacek, Gregor (ORCID: 0000-0001-7192-716X); Andany, Santiago ORCID logo
Publisher Rodare
Contributor Hummel, Stefan; Fantner, Georg; European Commission
Publication Year 2020
Funding Reference European Commission info:eu-repo/grantAgreement/EC/H2020/688072/
Rights Closed Access; info:eu-repo/semantics/closedAccess
OpenAccess false
Contact https://rodare.hzdr.de/support
Representation
Resource Type Dataset
Discipline Life Sciences; Natural Sciences; Engineering Sciences