An innovative process based on an oxygen non-thermal plasma (O2-NTP) generated in a sealed bag could be used for the sterilization of fragile medical devices. The purpose of this data collection was to assess the cytocompatibility of titanium (TA6V) and poly(etheretherketone) (PEEK) surfaces after O2-NTP sterilization compared to gamma-ray irradiation (GI) and autoclave (AC). This data collection contains the results of three hallmarks of cytocompatibility assessed on MG-63 osteoblast-like cells seeded on TA6V and PEEK disks sterilized by AC, GI and O2-NTP : cell's viability by WST1 assay, cell's proliferation by DNA quantification, and cytotoxicity by LDH assay.